| 摘要 |
PROBLEM TO BE SOLVED: To provide a correction method of measured data by which only deformed components are finely removed from the measured data which are taken in by a scanning probe microscope. SOLUTION: Concerning the matrix-like data to the number of N×M, first of all, a nth-line section histogram (B), namely a histogram of its height distribution, is pursued against a nth-line measured section (A) comprising data in nth row. Primary slope-correction is performed, as a peak value of the histogram becomes maximum, to thereby obtain a cross-section (C) after the primary slope-correction, and the histogram (D) after the primary slope-correction has a big peak. Moreover, secondary and tertiary slope-corrections are performed, as peak values of the histograms become maximum, to thereby obtain a cross- section (E) after the slope-corrections in many times, and the histogram (F) after the slope-corrections in many times has a sharp peak. Successively, an off-set in z-direction is given to each nth-line data, as the peak positions of the histograms are located on the same position.
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