| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas circulation equipment with a small amount of gas consumption, without the need for discharging a gas to the outside. SOLUTION: By operating a turbo blower 100 and a vacuum pump P and at the same time adjusting the opening of switching valves V3 and V4, a gas is circulated to a second gas circulation path RT21. More specifically, a mixed gas passes through a gas compression room 51 and a seal mechanism from a gas circulation path RT and flows into a bearing-retaining room 52. Then, it reaches an oil mist filter FT from an external port 7, where impurities such as oil is eliminated and then returns to the gas circulation path RT after passing through the switching valve V4. |
