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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS TEST METHOD
摘要
申请公布号
JPH11142480(A)
申请公布日期
1999.05.28
申请号
JP19970307534
申请日期
1997.11.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
DOI YOSHINORI
分类号
G01R31/28;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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