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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11145147(A)
申请公布日期
1999.05.28
申请号
JP19970308873
申请日期
1997.11.11
申请人
NEC CORP
发明人
WATANABE MASATO
分类号
H01L21/265;C30B15/00;C30B25/02;C30B31/22;H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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