| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of a pulse power unit which supplies the pumping energy of a pulse laser device such as an excimer laser device, carbon dioxide laser device, etc., by reducing the number of expensive parts with high breakdown voltage by lowering the circuit voltage and, at the same time, to reduce the size of the power unit by reducing the mounting space of a circuit in a metallic enclosure. SOLUTION: In a pulse power unit, positive and negative pulse power sources which respectively convert the electromagnetic energy stored in reactors 9A and 9B into the electrostatic energy of capacitors 2A and 2B by boosting are constituted symmetrically and, at the same time, the positive and negative circuits which successively transfer the electrostatic energy of the capacitors 2A and 2B to other capacitors 4A, 4B, 6A, and 6B are also constituted symmetrically. In addition, the power unit is provided with a control circuit 12 which can independently set the operating voltages and operating timing on the positive and negative pole sides. |
