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发明名称
TEMPERATURE MEASURING DEVICE FOR WAFER HOLDER AND WAFER ACCOMMOLATING CHAMBER
摘要
申请公布号
JPH11145234(A)
申请公布日期
1999.05.28
申请号
JP19970318918
申请日期
1997.11.05
申请人
TOKYO ELECTRON LTD
发明人
FURUYA KUNIHIRO
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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