| 摘要 |
<p>PROBLEM TO BE SOLVED: To judge whether a coordinate position of a measured position detecting mark is suitable or not, by permitting a range, which is close to a calculation value line and is formed at the coordinate position of the measured position detecting mark, to be a shot allowable value. SOLUTION: A detecting part 18 is provided with a means that measures a position detecting mark 20 on a wafer 16 and detects a coordinate position. A main computer part 19 is provided with a means that calculates the coordinate position of each shot based on the position detecting mark 20 obtained by the detecting part 18, and a failure detecting means for the position detecting mark, which generates a shot allowable value with a reference calculation value line generated by the calculated coordinate position of each shot and with the position detecting mark close to the line, and recognizes the mark as a suitable mark if the coordinate position of the measured position detecting mark 20 is within a range of the shot allowable value. The detecting part 18 and the main computer part 19 also detect unsuitable position detecting marks, remeasure the position detecting mark and correct it.</p> |
