| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer holder which smoothly transfers a wafer, is usable as a carrier for carrying the wafer and pref. usable for contacting wafers to contactors in batch. SOLUTION: A wafer chuck 2 comprises a main body 21 for holding a wafer W, openings 21E opened at the main body 21 surface, exhaust passage 21A formed in the body 21 to continue to the openings 21E, valve mechanisms 22A, 23A mounted in the inlets/outlets of the exhaust passages 21A, seal rings 24 mounted on the entire outer marginal edge of the main body 21 surface, through- holes 21D allowing free pins 11A to run for transferring the wafer W on the main body 21 surface and silicone rubber film 25 laid over the through-holes 21D to expand accompanying the up-down motion of the free pins 11A.</p> |
