| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate with a holding force which does not generate dislocation and restrain deformation of a substrate by intaking air inside an air hole connected to an opening part provided to a holding part which holds a substrate and sucking a board to a holding part by applying a negative pressure to a board, and controlling a negative pressure. SOLUTION: When a substrate 1 is mounted on an upper surface of a holder 2, a switching valve of a switching device 6 is set to joint a tube 9a and a tube 9c and a suction device 7 starts suction by maximum suction force of its own. Then, air inside a piping 15 is discharged rapidly, a negative pressure is applied to the board 1 through all the suction ports 4 and the substrate 1 is sucked and held to a surface of the holder 2. A vacuum pressure inside the piping 15 is kept almost constant by a pressure valve 3 and a negative pressure applied to the substrate 1 through the suction port 4 of the holder 2 is also kept almost constant. Thereby, the substrate 1 sucked and held on the holder 2 is not dislocated and deformation of a substrate can be restrained.</p> |
