POINT CONTACT TYPE CLAMP IN SPUTTERING EQUIPMENT,申请号JP19970292574-传众专利搜索

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发明名称	POINT CONTACT TYPE CLAMP IN SPUTTERING EQUIPMENT
摘要
申请公布号	JPH11145082(A)	申请公布日期	1999.05.28
申请号	JP19970292574	申请日期	1997.10.24
申请人	LSI LOGIC CORP	发明人	KATAOKA TAKAO
分类号	C23C14/34;C23C14/50;H01L21/203;H01L21/285;H01L21/31;(IPC1-7):H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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