| 摘要 |
PROBLEM TO BE SOLVED: To improve exchange efficiency and yield rate of a thin-film solar battery with a hetero junction, to enable to mass-produce the solar battery using an existing device, and to reduce manufacturing cost of the solar battery. SOLUTION: A manufacturing method of a thin-film solar battery is provided, wherein a metal backside electrode 3, a multiple element compound semiconductor thin film 4 having a P-type conductivity and used as a light absorbing layer, a transparent and high resistant sulfur-containing zinc mixed crystal compound semiconductor thin film 5 which is formed between the semiconductor thin film 4 and a metal oxide semiconductor thin film 6 and used as an interfacial layer, a metal oxide semiconductor thin film 6, and an upper electrode 7, are successively formed on a glass substrate 2. In this case, the conversion efficiency and yield of production of the thin film solar battery can be improved by performing high temperature drying treatment, such as an annealing at 100 to 250 deg.C in the vacuum atmosphere of 1 to 100 Torr for 10 to 120 minutes. |
