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发明名称
STAMPER AND PRODUCTION OF RESIST MASTER DISK FOR MANUFACTURING THE STAMPER
摘要
申请公布号
JPH11144332(A)
申请公布日期
1999.05.28
申请号
JP19970321961
申请日期
1997.11.10
申请人
CANON INC
发明人
HOZUMI YASUSHI
分类号
G11B11/10;G11B7/26;G11B11/105;(IPC1-7):G11B7/26
主分类号
G11B11/10
代理机构
代理人
主权项
地址
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