| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer processor which can suppress the generation of particles in wafer processing. SOLUTION: A wafer processor 101, which functions to transfer a wafer and perform a series of processing operations over the wafer, includes a plurality of pivoting robots 104 to 108 and a plurality of units 110, 120, 130, 140, 160, 170, 180 and 190. The pivoting robots 104 to 108 each have body and arm parts. The body part is turnable and movable in a horizontal direction. The arm part, which is extended from the body part, can hold the wafer. The wafer is transferred into and out of the respective processing units by the turning robots 104 to 108. |
