| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology in a wafer processor for comprehending a condition of wafer accommodated within a cassette. SOLUTION: A reflective sensor 10 is mounted to a shutter member 5 to cover a passage port 12a in a partition wall 12. The sensor 10 moving down integrally with the shutter member 5 sequentially detect wafers W within a cassette 1. A data processing unit 11 collects detection information on the wafers W. A position detection means, based on the information received from an encoder 13a provided to an elevator mechanism 7a, detects the position of the sensor 10. A processing unit 14, on the basis of the detection information of the wafers W and the position of the sensor 10, is capable of comprehending the condition of the substrates W within the cassette 1. |
