发明名称 THIN-FILM MAGNETIC HEAD AND ITS PRODUCTION
摘要 PROBLEM TO BE SOLVED: To provide a thin-film magnetic head of high performance which decreases side fringe magnetic fluxes at the time of writing by setting the throat height TH and MR height of magnetic pole parts to comply with desired design values even if these parts are made finer in order to improve a surface recording density and process for producing the same. SOLUTION: Thin-film coils 49, 51 insulated and separated by insulating layers 48, 50, 52 are formed on a first magnetic layer 47 and thereafter, a gap layer 53 is formed on the first magnetic layer and the insulating layers and further, a second magnetic layer 54 is formed according to prescribed patterns thereon. The gap layers 53 adjacent to the flanks of the magnetic pole parts of the second magnetic layer 54 is selectively removed by anisotropic etching and thereafter the first magnetic layer 47 is partially removed by ion milling to form apertures 55 having inner flanks which are a position reference. Air bearing surfaces are polished on the inner flanks as the reference for the position.
申请公布号 JPH11144211(A) 申请公布日期 1999.05.28
申请号 JP19970308636 申请日期 1997.11.11
申请人 TDK CORP 发明人 SASAKI YOSHITAKA;IIJIMA ATSUSHI
分类号 G11B5/265;G11B5/31;G11B5/39;(IPC1-7):G11B5/31 主分类号 G11B5/265
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