发明名称 WAFER WRITING METHOD AND WAFER READING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a wafer writing method for easy writing of information to a wafer, and to provide a wafer reading method for easy reading of the information. SOLUTION: Writing information is related to each of information opening parts in a block in advance, a hole is formed at such information opening part as corresponding to a desired writing information, position opening parts 1a-1f are formed at a position being upper part of the block on a wafer 100 corresponding to lines of specified number in the block for writing into the wafer 100, the position opening parts 1a-1f are detected against the wafer 100 written like that are detected, and information opening parts 2a-2f, 3a-3f, 4a-4f in blocks 7a and 7b are detected at the same timing as detection of the position opening parts 1a-1f. Such information opening part as a hole is formed in the blocks 7a and 7b is identified with that detection signal, and based on the result, the information written to the wafer 100 is read.
申请公布号 JPH11145017(A) 申请公布日期 1999.05.28
申请号 JP19970302028 申请日期 1997.11.04
申请人 OKI ELECTRIC IND CO LTD 发明人 KOBAYASHI SHOZO
分类号 H01L21/677;H01L21/02;H01L21/68;(IPC1-7):H01L21/02 主分类号 H01L21/677
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