| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element which is able to form an insulating surface protection film over a wide range, without eliminating a precious metal electrode layer which forms an electrode film, can prevent short circuiting due to whiskers, etc., can lower the resistance of the electrode film and also can suppress change in time increase of the CI value and frequency changes. SOLUTION: A piezoelectric element 1 serves as tuning fork type crystal vibrator, and two electrode films 40 are formed on both side of a piezoelectric element piece 2 with a prescribed gap 10 secured between both firms 40 respectively. The electrode film 40 includes a gold electrode layer 42A laminated on the surface of a foundation metal film 41, and the surface of the layer 42A is cover with a thiol-treated film 44 and an insulating surface protective film 45. The film 45 is a condensed film of metallic alkoxide or a heat treated film of polysilazane and also covers the connecting part of an internal terminal 31 of a plug 30 and the piece 2.
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