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发明名称
RIBBON FILAMENT FOR ION IMPLANTER AND ITS ASSEMBLED BODY
摘要
申请公布号
JPH11142599(A)
申请公布日期
1999.05.28
申请号
JP19980259774
申请日期
1998.09.14
申请人
EATON CORP
发明人
KELLERMAN PETER L
分类号
G21K5/04;H01J1/16;H01J37/02;H01J37/06;H01J37/08;(IPC1-7):G21K5/04
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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