ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To secure electric connection between a transparent pixel electrode and a source electrode by preventing the transparent pixel electrode from being discontinuous. SOLUTION: A Mo film 28A being a material of a source electrode S is formed at >=150 deg.. Thereby the average surface roughness Ra of the source electrode S becomes <=1.5 nm. Since the average surface roughness Ra is reduced, a normally tapered contact aperture 29h can be formed on a protection insulating film 29 formed on the electrode S. Consequently both the electrode S and a transparent pixel electrode 30 can be connected through the aperture 29h without being discontinuous.