发明名称 MICRO-LENS INSPECTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a micro-lens inspecting device in which the inspection of micro-lenses is improved. SOLUTION: A parallel light incidence means 11 makes parallel light L2 incident on a micro-lens 12. An inspection processing means 14 captures transmitted light L3 transmitted through the micro-lens 12, discriminates only a specific part with a significant difference from other parts of the micro-lens from the measured values of the transmitted light L3, and determines it as failure.
申请公布号 JPH11142285(A) 申请公布日期 1999.05.28
申请号 JP19970304632 申请日期 1997.11.06
申请人 SONY CORP 发明人 MATSUI MASATO
分类号 G01M11/00;G02F1/1335;G09F9/00;G09F9/35 主分类号 G01M11/00
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