首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH11144891(A)
申请公布日期
1999.05.28
申请号
JP19970305922
申请日期
1997.11.07
申请人
TOSHIBA CORP
发明人
YAMAZAKI OSAMU
分类号
H05H1/46;C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
SYSTEM OF CONNECTION FOR REMOTELY SUPPLYING POWER
BARRELS AND PIPES CLEANING APPARATUS
CORNER BURNER OPERATION METHOD FOR A CHAMBER-TYPE BURNER FURNACE WITH TANGENT ARRANGEMENT OF BURNERS AND CORNER BURNER THEREFOR
DOOR MOUNTING FRAME IN PARTICULAR THAT FOR FIRE DOOR
TOPSOIL PROPERTIES ENHANCING BEDDING MATERIAL
METHOD OF ISOLATING CAROTENES FROM NATURAL RAW MATERIAL
TUBULAR HEAT EXCHANGER
METHOD OF DESULPHURISING FLUE GAS COMBINED WITH SIMULTANEOUS PRODUCTION OF ARTIFICIAL AGGREGATE
METHOD OF PACKAGING ARTICLES OF FOOD INTO SQUEEZED TUBES
DEVICE FOR COLLECTING DOG'S EXCREMENT
SHELVED RACK
CABLE BUSHING IN PARTICULAR FOR EXPLOSION-PROOF ELECTRIC EQUIPMENT
DATA CARDS TRANSPORTING APPARATUS
METHOD OF INDUCING ACTIVE IMMUNITY USING A VACCINE CONJUGATE
Apparatus for receiving and correlating a spread spectrum signal
System and method for detecting and analyzing a queue
Process for manufacture of chiral succinic acid derivatives
10-substituted 1,8-dihydroxy-9(10H) anthracenone pharmaceuticals
Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask
System with meshed power and signal buses on cell array