| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for improving the durability of a piezoelectric actuator by enhancing the adhesion strength of the joint interface between a ceramics layer with the piezoelectric characteristics of a laminated-type sintered body and an inter-electrode layer. SOLUTION: A piezoelectric actuator consists of a laminated-type sintered body, where an inner electrode layer 5 is added to both the surfaces of a green sheet 4 consisting of ceramics with piezoelectric characteristics, a plurality of green sheets 8 and 9 in that one portion of the inner electrode layer 5 infiltrates the green sheet 4 are laminated, and they are sintered and one portion of the inner electrode layer infiltrates a ceramics layer 4' as shown in 8' and 9'. |
