| 摘要 |
<p>The invention provides a detector for secondary particles and an arrangement of such a detector in a particle beam apparatus. The detector for the secondary particles is arranged in the beam path of the primary particles and has a scintillating layer for the creation of photons which are subsequently analyzed. Thereby, scintillating layer (16) and its carrier (14) is very thin in a region around the passage opening so that the primary beam is influenced only slightly even so the passage opening is very narrow. With such a shaped opening passage secondary particles close to the axis can also be detected.</p> |
