VIBRATION ELIMINATOR, ALIGNER AND PROJECTION EXPOSURE METHOD

摘要

The columns (48) of an aligner are placed on a surface plate (20). Actuators (46A-46D) are provided between the surface plate (20) and the leg parts (48a-48d) of the column (48). Acceleration sensors (50A-50D and 52A-52D) are attached to the surface plate (20) and the leg parts (48a-48d) of the column (48) near the leg parts (48a-48d) of the column (48) respectively. Relative vibrations in +/-Z directions which are generated between the surface plate (20) and the column (48) are detected by the acceleration sensors (50A-50D and 52A-52D) and, in accordance with the detection results, driving forces generated by the actuators (46A-46D) in +/-Z directions are controlled. Further, vibration eliminators are attached to the important points of the surface plate (20), the column (48) or a lower base (25) and vibrations generated locally in the surface plate (20), the column (48) or the lower base (25) are reduced by the vibration eliminators.