NIEDERTEMPERATURHERSTELLUNG VON TiN FILMEN MITTELS PLASMA CVD,申请号DE19956006865T-传众专利搜索

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发明名称	NIEDERTEMPERATURHERSTELLUNG VON TiN FILMEN MITTELS PLASMA CVD
摘要
申请公布号	DE69506865(T2)	申请公布日期	1999.05.27
申请号	DE19956006865T	申请日期	1995.04.03
申请人	TOKYO ELECTRON LTD., TOKIO/TOKYO, JP	发明人	FOSTER, ROBERT, F., PHOENIX, AZ 85044, US;HILLMAN, JOSEPH, T., SCOTTSDALE, AZ 85250, US
分类号	C23C8/02;C23C8/36;C23C16/02;C23C16/34;C23C16/50;H01L21/28;H01L21/285;H01L21/768;(IPC1-7):C23C16/02	主分类号	C23C8/02
代理机构		代理人
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