| 摘要 |
<p>An anode includes an anode cup (202), a membrane (208) and ion source material (206), the anode cup (202) and membrane (208) forming an enclosure in which the ion source material (206) is located. The anode cup (202) includes a base section (216) having a central aperture (214) and the membrane (208) also has a central aperture (207). A jet (200) is passed through the central aperture (214) of the base section (216) of the anode cup (202) and through the membrane (208) allowing plating solution to be directed at the center of a wafer being electroplated.</p> |
