发明名称 Ultrasonic vibration bonding chip mounter
摘要 An ultrasonic vibration bonding chip mounter comprises a chip carrying unit arranged above a chip supply unit, a prealignment unit and a mounting unit which are arranged in a row and having a movable table which can move back and forth in a direction parallel to a direction where these units are arranged, a pick-up unit, attached to the movable table, for transferring a chip from the chip supply unit to the prealignment unit, and an ultrasonic vibration bonding unit, attached to the movable table, for transferring the chip from the prealignment unit to a mounting unit so that the chips are transferred from the chip supply unit to the prealignment unit and further to the mounting unit by the reciprocation of the movable table one by one. <IMAGE>
申请公布号 EP0822741(A3) 申请公布日期 1999.05.26
申请号 EP19970110764 申请日期 1997.07.01
申请人 ULTEX CORPORATION 发明人 SATO, SHIGERU;KATSUMI, MITSUGU;NAKAI, SEIYA
分类号 H01L21/52;B23K20/10;H01L21/60;H01L21/607;H05K13/04;(IPC1-7):H05K13/04;H05K13/08 主分类号 H01L21/52
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