Ion implantation apparatus,申请号GB19990007433-传众专利搜索

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发明名称	Ion implantation apparatus
摘要
申请公布号	GB9907433(D0)	申请公布日期	1999.05.26
申请号	GB19990007433	申请日期	1999.03.31
申请人	NEC CORPORATION	发明人
分类号	H01J37/317;H01L21/265;H01L21/67;H01L27/00	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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