| 摘要 |
PROBLEM TO BE SOLVED: To provide a base plate conveying robot and a method for conveying a base plate, capable of shortening the conveying time of the base plate. SOLUTION: In a robot device 20 for conveying a base plate is provided with an arm body 32 in which a plurality of arms 33, 34 are rotatably connected to each other and a holding part 35 for holding the base plate is rotatably connected to the arm 34 on the tip, a rotational driving means 24 for rotationally driving the arm body 32, an arm driving means 29 for advancing the holding part 35 in the radial direction in relation to the rotational center of the arm body 32, a rotational driving means 24 for rotationally driving the arm body 32 along the rotating direction of a device main body 22, and a control means 47 for decreasing vibration in the holding part 35 by adjusting natural frequencies to be generated by driving of the rotational driving means 24 and the arm driving means 29. |
