| 摘要 |
A discharge excitation type pulse laser apparatus includes main discharge electrodes and and an auxiliary discharge electrode. In order to make a voltage pulse applied to the auxiliary discharge electrode rise up steeply without incurring any appreciable time lag, a reactor connected in series to a first charging capacitor is constituted by a first saturable reactor 19 with a second saturable reactor being additionally inserted in series to a second charging capacitor. After stray inductance and resistance components of a switch become minimum, inductance of the saturable reactor is first decreased, which is then followed by decreasing of inductance of the first saturable reactor. Degree of steepness of the voltage rise-up for corona and main discharges can set at high values, respectively, whereby preionization is accelerated to allow the main discharge to occur uniformly. The energy injected into the main discharge is increased. Laser output power and oscillation efficiency are enhanced.
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