| 摘要 |
PROBLEM TO BE SOLVED: To provide a grooved roller for a wire saw, capable of improving the cutting precision of a wafer by preventing the separation of a groove forming member from a roller mainbody. SOLUTION: A grooved roller 18 has a roller mainbody 34 and a groove forming member 36. The groove forming member 36 which is adhered to the roller mainbody has the outer periphery provided with grooves 40, 40,... in which a wire is wound. The end face of the groove forming member 36 is formed into a circular shape or in a tapered shape so that stress concentration caused at both ends of an adhesive area between the roller mainbody 34 and the groove forming member 36 can be reduced. In this way, the separation of the groove forming member 36 from the roller mainbody 34 is prevented. |
