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发明名称
XY-STAGE
摘要
申请公布号
KR19990036523(A)
申请公布日期
1999.05.25
申请号
KR19980021373
申请日期
1998.06.09
申请人
SAMSUNG ELECTRONICS CO LTD
发明人
WOO CHANG-WOO;CHOI KYUE-SANG;SHIN YEUN-KYOUNG;WOO JAE-YOUNG
分类号
H01L21/68;H01L21/66
主分类号
H01L21/68
代理机构
代理人
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地址
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