| 摘要 |
PROBLEM TO BE SOLVED: To control shrinkage in a reactive sintering process and to obtain Y2 SiO5 ceramics less liable to cracking and deformation and excellent in dimensional precision by subjecting a compact of a powdery mixture contg. Si and Y2 O3 to reactive sintering in an oxidizing atmosphere. SOLUTION: A powdery mixture is prepd. by mixing Si of 1.0-50 μm average particle diameter with SiO2 of 0.1-5.0 μm average particle diameter and Y2 O3 of 0.1-5.0 μm average particle diameter in an Si to SiO2 molar ratio of 0.1-20, preferably 2.0-10. The mixture is compacted and the resultant compact is subjected to reactive sintering at 1,100-1,700 deg.C for 0.5-2 hr in an oxidizing atmosphere after heat treatment at 700-1,700 deg.C, preferably 700-1,500 deg.C for 0.5-3 hr in the atmosphere. Shrinkage in the reactive sintering process is controlled to <=10% and the objective Y2 SiO5 ceramics is obtd. The powdery mixture may contain Y, SiO2 and Y2 O3 preferably in a Y to Y2 O3 molar ratio of 0.1-15. |
