| 摘要 |
PROBLEM TO BE SOLVED: To secure the recovering quantity of a prescribed product gas by dividing a cleaning process into a pre-cleaning process and a main cleaning process and using a waste gas in the main cleaning process as a gas to be introduced into an adsorption column in the pre-cleaning process. SOLUTION: A pressure swing adsorption process is performed by repeating a pressure rising, an adsorption, a pressure reducing, the cleaning and a product recovering processes to purify CO from a gaseous starting material. In such a case, the cleaning process is divided into the pre-cleaning process and the main cleaning process, and in the main cleaning process, the waste gas discharged from the adsorption columns A-D is introduced into the pre-cleaning process. That is, a valve V-9 is provided in a recycling line L1, a gas line L3 for pre-cleaning is connected to a cleaned gas feed line L2 and valves V-10, V-11, the blower 5 and a gas tank 6 for pre-cleaning are provided. The waste gas after the cleaning of the adsorption columns A-d in the main cleaning process is stored in the gas tank 6 for pre-cleaning by the blower 5 and utilized for the next pre-cleaning process. |
