| 摘要 |
A color synthesizing scanning electron microscope having a scanning primary beam of electrons directed toward a specimen (12), is configured to produce color images of high information content. The mic roscope comprises at least two wide energy bandwidth secondary electron detectors (14, 16, 18), arranged around the specime n at predetermined variable angles, for receiving electron emission from the specimen subsequent to incidence of the scanning prim ary electron beam. The wide energy bandwidth secondary detectors detect electrons with trajectory or positional differences a nd convert the positional differences to signals for synthesizing color. The signals from the wide energy bandwidth secondary ele ctron detectors are combined to generate signals representative of different colors. Additional signals representing a di fference between any two input signals from the wide energy bandwidth secondary detectors can also be generated.
|
