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发明名称
CVD DEVICE AND CVD TREATING METHOD
摘要
申请公布号
JPH11140651(A)
申请公布日期
1999.05.25
申请号
JP19970302022
申请日期
1997.11.04
申请人
TOSHIBA CORP
发明人
ONOE SEIJI
分类号
C23C16/44;C23C16/458;C23C16/46;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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