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摘要
申请公布号
JP2894900(B2)
申请公布日期
1999.05.24
申请号
JP19920222036
申请日期
1992.07.28
申请人
NIPPON DENKI AISHII MAIKON SHISUTEMU KK
发明人
ORITA NOBUYUKI
分类号
G01R31/28;H01L21/66;H01L21/822;H01L27/04;H01L27/10;(IPC1-7):G01R31/28
主分类号
G01R31/28
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