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发明名称
摘要
申请公布号
JP2893493(B2)
申请公布日期
1999.05.24
申请号
JP19910351260
申请日期
1991.12.13
申请人
MITSUBISHI MATERIARU KK;MITSUBISHI MATERIARU SHIRIKON KK
发明人
MORITA ETSURO;TATSUTA JIRO;SAKURAI MARI;SHIMANUKI YASUSHI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
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