发明名称
摘要 <p>PURPOSE:To cover a dicing device which is definitely excellent in terms of grooving work, and what is more, to embody a dicing device which has upgraded cutting speed and a cutting control method in the dicing device. CONSTITUTION:In terms of a dicing device which provides a spindle motor 2 which rotates a wheel blade 1 at a high speed, a mobile mechanism 3 which moves a work piece to the wheel blade 1 and a control section 6 which controls the rotation of the spindle motor 2 and the feed of the mobile mechanism 3, a load detection means 5 is installed to detect an electric power value of the spindle motor 2. The control section 6 forces at least one of the feed speed of the mobile mechanism 3 and the rotary speed of the spindle motor 2 to be changed based on the electric power value thus detected.</p>
申请公布号 JP2894906(B2) 申请公布日期 1999.05.24
申请号 JP19920320368 申请日期 1992.11.30
申请人 TOKYO SEIMITSU KK 发明人 TANAKA TOMOYUKI
分类号 B28D5/00;G05F1/247;H01L21/301;H01L21/78;(IPC1-7):H01L21/301 主分类号 B28D5/00
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