| 摘要 |
PROBLEM TO BE SOLVED: To obtain a piezoelectric detector using a piezoelectric thin film that can be compact and highly sensitive with small sensitivity irregularity, by setting on a recess-like part of a detector substrate, a film formation substrate, a lower electrode film, the piezoelectric thin film and an upper electrode film, and providing the film formation substrate with a cantilever beam having an end part fixed to the detector substrate or a beam fixed at both end parts. SOLUTION: A lower electrode film 102, a piezoelectric thin film 103, an upper electrode film 104 and a diaphragm film are set on a recess-like part of a film formation substrate 101. The piezoelectric thin film 103 is constituted in a cantilever having an end part fixed to the film formation substrate 101 or a beam having both ends fixed to the film formation substrate. Since a piezoelectric body is formed of a thin film material, the piezoelectric body can be processed minutely to form a minute detector in a diversified shape easily, and the whole detector can be made compact, thus enabling integration of the detectors. The diaphragm film is formed of a film material directly formed on the film formation substrate 101 or piezoelectric thin film 103. A bond process of a diaphragm and the piezoelectric thin film 103 is eliminated, so that sensitivity irregularities due to the bond process are reduced and reliability can be improved. |
