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发明名称
METHOD FOR CLEANING SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH11135437(A)
申请公布日期
1999.05.21
申请号
JP19970300939
申请日期
1997.10.31
申请人
SONY CORP
发明人
KAWAMOTO TAKEYOSHI
分类号
C23C16/44;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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