| 摘要 |
PROBLEM TO BE SOLVED: To remove dust attached to the front and rear surfaces of a reticle without damaging even a sticked thin film of pellicle, by blowing air to foreign matter attached portions so as to blow off the dust attached to the surface and near of the reticle when the reticle is rejected by a foreign matter detecting device. SOLUTION: This apparatus for detecting and removing foreign matters prevents reattachment of dust by fixing an exhausting device 24 to a foreign matter removing device so as to suck dust dispersed by charged air through an exhaust port. Foreign matters attached to a reticle R (pericle) are blown off by the charged air, however, the blown foreign matters descend again after flying in the sir. In order to prevent the descendent foreign matters from reattaching to the reticle R, the exhausting device 24 is provided at a side opposite to air nozzles 23 so as to release the dispersed foreign matters outside a reducing projection aligner. Elimination of the exhausting device 24, i.e., arrangement of only the exhaust port may suffice to prevent reattachment of the blown foreign matters to the reticle R. |
