PRODUCTION OF OPTICAL WAVEGUIDE PART

摘要

PROBLEM TO BE SOLVED: To provide a process for production capable of reducing the cost of optical waveguide parts having V-grooves. SOLUTION: This process for producing the optical waveguide parts having plane optical waveguide core parts 4a and V-grooves 1d on a substrate 1 has a stage for successively forming a lower clad layer 3 and a core layer 4 on the substrate 1, then etching the core layer 4 to form the optical waveguide core parts 4a and exposing the parts to be formed with the V-grooves 1d of the substrate 1 surface with the lower clad layer 3 and the core layer 4 as a mask and a stage for etching the exposed substrate surface 1c to form the V-grooves 1d, then laminating the upper clad layer 5 and subsequently removing the upper clad layer 5 on the V-grooves 1d.