| 摘要 |
PROBLEM TO BE SOLVED: To execute maintenance of a laser source, such as gas change or gas injection at timings when an aligner body does not use laser, by providing a structure wherein operations of the laser source, such as gas change, gas injection and the like are coordinated with a treating operation of the aligner body. SOLUTION: Four interface signals are newly provided between a main control unit 40 at a stepper side and a control system 12 at a laser source side so as to execute coordination control. A signal PGR. REQ(PGR REQUEST) is sent from the side of an excimer laser source to an aligner body, which notifies the aligner body that the necessity for conducting partial gas change (PGR operation) or halogen gas injection (HI operation) is pressing by varying the signal level (which operation is represented by Lo→Hi). Further, the signal also notifies as to the completion of the partial gas change or the halogen gas injection to the aligner body by varying the signal level as Hi→Lo. |
