BOARD TREATMENT EQUIPMENT AND INTERMEDIATE DELIVERY EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a board treatment equipment where foot print is reduced and an intermediate delivery equipment. SOLUTION: A board treatment equipment 100 is provided with an indexer 1, a treatment unit 2 and an interface unit 3. An exposure unit 4 is arranged adjacently to the interface unit 3. The interface unit 3 is equipped with a board carrying robot 33, a board carrying-in table 34 and a board carrying-out table. The board carrying-in table 34 and the board carrying-out table are stacked in the vertical direction.