LAYER INSULATION FILM AND MANUFACTURE OF DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To improve reliability of a multilayer metallic wiring and electrical characteristic of a display device, by relaxing and flattening unevenness on a layer insulation film remarkably. SOLUTION: A formation method of a layer insulation film wherein an SOG film is used has a process for emitting ultraviolet ray 8, whose wavelength is 100 to 300 nm in atmosphere including an oxygen element, and generating and emitting ozone and active oxygen atom and a process for forming a second inorganic SOG film 9 thereon.