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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11135687(A)
申请公布日期
1999.05.21
申请号
JP19970301271
申请日期
1997.10.31
申请人
TOSHIBA CORP
发明人
GOTO MASAO;FUKUZAWA YUJI
分类号
H01L21/60;H01L23/28;H01L23/31;H01L23/495;(IPC1-7):H01L23/28
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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