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发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH11135052(A)
申请公布日期
1999.05.21
申请号
JP19970298341
申请日期
1997.10.30
申请人
HITACHI LTD
发明人
SUZUKI NAOMASA
分类号
H01J37/21;H01J37/252;H01J37/28;(IPC1-7):H01J37/21
主分类号
H01J37/21
代理机构
代理人
主权项
地址
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