PRODUCTION OF OPTICAL WAVEGUIDE PART

摘要

PROBLEM TO BE SOLVED: To provide a process for production capable of reducing the cost of optical waveguide parts having V-grooves. SOLUTION: This process for producing the optical waveguide parts having plane optical waveguides and V-grooves 1a on a substrate 1 has a stage for forming the V-grooves 1a by etching a substrate 1 surface, then a stage for successively laminating a lower clad layer 3 and a core layer 4 on this substrate 1, then etching the core layer 4 to form optical waveguide core parts 4a, then laminating an upper clad layer 5 and forming the plane optical waveguides having the optical waveguide core parts 4a and a state for exposing the V- grooves 1a by removing the upper clad layer 5 and lower clad layer 3 on the V-grooves 1a.