| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily analyze the compsn. of a minute part without being affected by the periphery of the minute part by accumulating a membrane with a known compsn. on a peripheral region excepting a measuring minute part. SOLUTION: A foreign matter 11 is present on an Si substrate 10 and a membrane with a known compsn. is accumulated on a region excepting the foreign matter centering around the foreign matter 11 in the periphery of the foreign matter 11. When this sample is analyzed, back scattering electrons 14 and Auger electrons 15, 17 excited by electrons 16 scattered by the foreign matter 11 to be re-incident on the Si substrate 10 and detected by a detector are Auger electrons generated from the surface of the membrane 18 and Auger electrons other than them are generated from the foreign matter 11. By this constitution, the accumulated membrane 18 is always detected but the compsn. thereof is known and the compsn. of the foreign matter 11 is easily analyzed. Therefore, the compsn. of the minute part can be easily analyzed without being affected by the periphery of the minute part.</p> |
